Paul Scherrer Institut, Laboratory for Micro- and Nanotechnology

Partner location

Würenlingen 5303

Sites providing access

Paul Scherrer Institut
Laboratory for Micro- and Nanotechnology CH-5232
Villigen - Switzerland

PSI - offical website: -  is the largest national research centre for natural and engineering sciences within Switzerland.

It performs world-class research in three main subject areas: Matter and Material, Energy and the Environment, and Human Health. Several large-scale facilities are presently operated at PSI such as the SINQ neutron spallation source, the Swiss Light Source (SLS), the SμS muon source and the hard x-ray Free Electron Laser source SwissFEL is presently under construction.

In this project, PSI will participate with the Laboratory for Micro and Nanotechnology (LMN), founded as a PSI research unit in 1993 -

LMN operates state-ofthe-art equipment for nanolithography, thin film technology, pattern transfer and fine analysis, mainly run in about 500 m2 of clean-room environment.

PSI role in NFFA Europe:

PSI provides access to Lithography and Patterning; Growth and Synthesis; Characterisation

PSI contributes to Joint Research on In-Operando and high thoughput methods; High Precision Manufacturing; Time-resolved ultrafast probes on nanosystems; it contributes also to Innovation and networking activities

PSI leads Joint Research on Lithography and Patterning; High Precision Manufacturing